Generation and growth of nanoparticles in low-pressure plasmas*
نویسندگان
چکیده
This invited talk focuses on two aspects of generation and growth of nanometer-sized particles in chemically active low-pressure plasmas: the nucleation of initial clusters and the subsequent growth due to coagulation of primary particles. Progress on the modeling of these processes is presented.
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تاریخ انتشار 1999